This KML special LinearMotorSystem performs the movement of the scanner in a semiconductor manufacturing machine. The following points represent a partition of the customers requirement catalogue:

• compact cross section dimensions
• very short system length with large stroke
• high Resolution
• very high synchronous running characteristics
• clean room suitable version
• execution of the function and quality assurance by the supplier

Solution

The application was realized by following constructional developments:

• special geometrical dimensions
• short slide unit-length
• compact mechanical end stops
• use of clean room suitable materials and/or with special coated surfaces
• length measuring system with high Resolution
• high performance linear motors with compact dimensions
• IKO high precision linearways