For chemical treatment process at the workpiece a compact two axis
system for a turning stroke with modular structure and uniform interface
was demanded to the platform. In order to be able to ensure a process
security during processing of the sensitive workpiece under external
changing dynamic effects a very rigid and vibration-poor construction
method is necessary. Truth of running of the high-dynamic turning
unit under microns are requested. Due to the extremely aggressive
media special materials and finish quality are inevitable. Since
the machines are used in the three-shift operation, an appropriate
reliability and stability are necessary. All relevant positions of
the unit must be easily attainable for maintenance and service work.
The entire assembly must correspond to a defined clean room class.
The functional inspection takes place by the supplier.
Due to FEM computations an integral, compact casting design with
high rigidity of the system could be realized. The axis of rotation
is moved over one
ballscrew vertically. The dynamic and static rigidity of the axis
of rotation was realized by a special arrangement of preloaded linearways
with stainless IKO roller ways. The demanded rotational accuracy
for higher revolutions was realized by the applied preloades ball
bearings for high numbers of revolutions. The electric drive of both
axis is realized by servo motors. All construction units were equipped
in corrosion protected version with a combined coating against extremely
aggressive chemical effects in the wet and drying range. Bearings,
ballscrew and linear ways are lubricated with appropriate IKO clean
room grease. All movements are
supervised by contactless sensor technology. The assembly is examined
and logged for its demanded expiration operational sequence to 100%.
A function control is accomplished by application identically test
procedure with each manufactured assembly.