The system presented here is used as vertical axis in a semiconductor manufacturing machine, for Pick and Place tasks. The excellent productivity and process security of the manufacturing station could be realized due to a combination of the following advantages:

• dynamics
• highest positioning accuracy
• structural rigidities
• smallest particle contamination
• compact design

The linear motor system was equipped for this application with the following optional accessories:

• higher positioning accuracy
• customized mounting hole pattern for slides and base plates
• maintenance-free linear guiding system
• clean room suitable execution
• customized mechanical end stops
• motor and feedback extension cables
• parameter set for first start-up on electronic data medium